Study of structural and electrical properties of zinc oxide and Al-doped zinc oxide thin films deposited by DC sputteringAmira Barhoumi, Liu Yang, Nawfel Sakly, Habib Boughzala, Gérard Leroy, Joël Gest, Jean-Claude Carru and Samir GuermaziEur. Phys. J. Appl. Phys., 62 2 (2013) 20302DOI: https://doi.org/10.1051/epjap/2013120535