Nanostructural defects evidenced in failing silicon-based NMOS capacitors by advanced failure analysis techniquesEmilie Faivre, Roxane Llido, Magali Putero, Lahouari Fares and Christophe MullerEur. Phys. J. Appl. Phys., 66 1 (2014) 10103DOI: https://doi.org/10.1051/epjap/2014130386