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Investigation on optical and physico-chemical properties of LPCVD SiO_xN_y thin films

Bessem Kaghouche, Farida Mansour, Christine Molliet, Bernard Rousset and Pierre Temple-Boyer

Eur. Phys. J. Appl. Phys., 66 2 (2014) 20301

DOI: https://doi.org/10.1051/epjap/2014130550

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