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Characterization and optimization of ion implantation for high spatial resolution quantum well intermixing in GaAs/AlGaAs superlattices

Usman Younis, Barry M. Holmes and David C. Hutchings

Eur. Phys. J. Appl. Phys., 66 1 (2014) 10101

DOI: https://doi.org/10.1051/epjap/2014140020

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