The role of Ar flow rates on synthesis of nanostructured zirconium nitride layer growth using plasma enhanced hot filament nitriding (PEHFN) techniqueUzma Ikhlaq, Akira Hirose, Riaz Ahmad, Amir Ikhlaq, Sehrish Saleem, Ramaswami Sammynaiken, Chunzi Zhang and Jason MalleyEur. Phys. J. Appl. Phys., 69 1 (2015) 10801DOI: https://doi.org/10.1051/epjap/2014140246