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DBD reactor design and optimization in continuous AP-PECVD from HMDSO/N₂/N₂O mixture

Petr Hotmar, Hubert Caquineau, Raphaël Cozzolino and Nicolas Gherardi

Eur. Phys. J. Appl. Phys., 73 2 (2016) 20801

DOI: https://doi.org/10.1051/epjap/2016150525

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EPJ AM Call for papers: Themed Issue on Global Advances in Electromagnetic Metasurfaces for Space
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EPJ B Topical Issue: Phase Transitions and Magnetism in Spin Systems
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EPJ C Topical Collection on String theory predictions for astroparticle and collider physics, and beyond
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EPJD Topical Issue : Exploring Dissociative Electron Attachment Processes
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