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Analysis and detection of an incorrect profile shape in a classical scatterometric process

Zaki Sabit Fawzi, Stéphane Robert, Ismail El Kalyoubi and Bernard Bayard

Eur. Phys. J. Appl. Phys., 76 3 (2016) 31001

DOI: https://doi.org/10.1051/epjap/2016160157

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