Film formation from HMDSO: comparison of direct plasma injection with afterglow injection using an atmospheric pressure dielectric barrier dischargeRoger Wallimann, Gina Oberbossel, Denis Butscher and Philipp Rudolf von RohrEur. Phys. J. Appl. Phys., 79 2 (2017) 20801DOI: https://doi.org/10.1051/epjap/2017160478