Modelling of low-temperature/large-area distributed antenna array microwave-plasma reactor used for nanocrystalline diamond depositionFabien Bénédic, Benoit Baudrillart and Jocelyn AchardEur. Phys. J. Appl. Phys., 81 1 (2018) 10804DOI: https://doi.org/10.1051/epjap/2017170238