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Nanomechanical spectroscopy of ultrathin silicon nitride suspended membranes

Sanket S. Jugade, Anuj Aggarwal and Akshay K. Naik

Eur. Phys. J. Appl. Phys., 94 2 (2021) 20301

DOI: https://doi.org/10.1051/epjap/2021210068

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