Variations in composition and structure occurring in multicomponent alloy targets during their service termLeonid R. Shaginyan, Mikhail I. Mironov, Sergey A. Firstov, Nicolay A. Krapivka, Valery V. Kremenitsky and Viktor N. NovichenkoEur. Phys. J. Appl. Phys., 98 (2023) 4DOI: https://doi.org/10.1051/epjap/2022220220