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Angular distribution of sputtered particles from Inconel⁷¹⁸: a simulation study

Kawtar Bria, Mohammed Ait El Fqih, Jean-Michel Nunzi, Lamia Jadoual and Abdelilah Kaddouri

Eur. Phys. J. Appl. Phys., 98 (2023) 26

DOI: https://doi.org/10.1051/epjap/2023220334

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