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Deposition of optical coatings with real time control by the spectroellipsometry

P. Bulkin, D. Daineka, D. Kouznetsov and B. Drévillon

Eur. Phys. J. Appl. Phys., 28 2 (2004) 235-242

DOI: https://doi.org/10.1051/epjap:2004191

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