Control and monitoring of optical thin films deposition in a Matrix Distributed Electron Cyclotron Resonance reactorD. Daineka, D. Kouznetsov, P. Bulkin, G. Girard, J.-E. Bourée and B. DrévillonEur. Phys. J. Appl. Phys., 28 3 (2004) 343-346DOI: https://doi.org/10.1051/epjap:2004198