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Influence of hydrogen partial pressure on growth and properties of nanocrystalline SiC by magnetron sputtering

M. Madani, H. Colder, X. Portier, K. Zellama, R. Rizk and H. Bouchriha

Eur. Phys. J. Appl. Phys., 36 1 (2006) 17-23

DOI: https://doi.org/10.1051/epjap:2006106

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