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Structural and optical properties of silicon nitride film generated on Si substrate by low energy ion implantation

D. Dorranian, P. Azadfar, A. H. Sari, S. Ghorbani, A. Hojabri and M. Ghoranneviss

Eur. Phys. J. Appl. Phys., 42 2 (2008) 103-107

DOI: https://doi.org/10.1051/epjap:2008039

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