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Thickness and substrate effects on AlN thin film growth at room temperature

B. Abdallah, C. Duquenne, M. P. Besland, E. Gautron, P. Y. Jouan, P. Y. Tessier, J. Brault, Y. Cordier and M. A. Djouadi

Eur. Phys. J. Appl. Phys., 43 3 (2008) 309-313

DOI: https://doi.org/10.1051/epjap:2008082

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