Bulge test and AFM point deflection method, two technics for the mechanical characterisation of very low stiffness freestanding filmsP. Martins, P. Delobelle, C. Malhaire, S. Brida and D. BarbierEur. Phys. J. Appl. Phys., 45 1 (2009) 10501DOI: https://doi.org/10.1051/epjap:2008187