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Diagnostic of 13.56 MHz RF sustained Ar–N₂ plasma by optical emission spectroscopy

F. U. Khan, N. U. Rehman, S. Naseer, M. A. Naveed, A. Qayyum, N. A.D. Khattak and M. Zakaullah

Eur. Phys. J. Appl. Phys., 45 1 (2009) 11002

DOI: https://doi.org/10.1051/epjap:2008198

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