Phase-shift mask fabrication at micrometric scale by ion-exchange in glass for astronomical wavefront sensorsXesús Prieto-Blanco, Carlos Montero-Orille, Héctor González-Núñez, Vicente Moreno, Manuel P. Cagigal and Jesús LiñaresEPJ Web Conf., 238 (2020) 02004DOI: https://doi.org/10.1051/epjconf/202023802004