Enhanced thin film analysis via High Resolution RBS using the NEC CARBS systemThomas Pollock, Eric Alderson, Kevin Berk, Levon McQuown, Ilya Kostanovskiy, Peng Wang, Dmitry Knyazev and Stuart S. P. ParkinEPJ Web Conf., 261 (2022) 01006DOI: https://doi.org/10.1051/epjconf/202226101006