Thermo-optic phase shifter based on amorphous silicon carbideElisa D. Mallemace, Yaoqin Lu, Xiaodong Shi, Didier Chaussende, Vincent Tabouret, Sandro Rao, Haiyan Ou and Francesco G. Della CorteEPJ Web Conf., 287 (2023) 14010DOI: https://doi.org/10.1051/epjconf/202328714010