Comparison measurements for hybrid evaluation approaches in optical nanometrologyTim Käseberg, Bernd Bodermann, Matthias Sturm, Matthias Wurm, Thomas Siefke, Lauryna Siaudinyté, Astrid Tranum Rømer and Poul-Erik HansenEPJ Web Conf., 309 (2024) 02005DOI: https://doi.org/10.1051/epjconf/202430902005