Characterization of thin natSi targetsJ.R. Fuentes-Carreón, J. Mas-Ruiz, D.J. Marín-Lámbarri, Arcadio Huerta, Stephen Muhl, A. Rodríguez-Gómez and Efraín ChávezEPJ Web Conf., 333 (2025) 01003DOI: https://doi.org/10.1051/epjconf/202533301003