Impact of deposition parameters on the material quality of SPC poly-Si thin films using high-rate PECVD of a-Si:HAvishek Kumar, Per Ingemar Widenborg, Goutam Kumar Dalapati, Gomathy Sandhya Subramanian and Armin Gerhard AberleEPJ Photovolt., 6 (2015) 65303DOI: https://doi.org/10.1051/epjpv/2015004