Structure and mechanical properties of low stress tetrahedral amorphous carbon films prepared by pulsed laser depositionM. Bonelli, A. C. Ferrari, A. Fioravanti, A. Li Bassi, A. Miotello and P. M. OssiEur. Phys. J. B, 25 3 (2002) 269-280DOI: https://doi.org/10.1140/epjb/e20020031