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Fabrication and repair of GaN nanorods by plasma etching with self-assembled nickel nanomasks

Shiying Zhang, Lei Zhang, Yueyao Zhong, Guodong Wang and Qingjun Xu

Eur. Phys. J. Appl. Phys., 93 3 (2021) 30405

DOI: https://doi.org/10.1051/epjap/2021210002

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