Crystallization of HfO2 thin films and their influence on laser induced damageZoltán Balogh-Michels, Igor Stevanovic, Ruggero Frison, Andreas Bächli, Daniel Schachtler, Thomas Gischkat, Antonia Neels, Alexander Stuck and Roelene BothaEPJ Web Conf., 238 (2020) 12004DOI: https://doi.org/10.1051/epjconf/202023812004