Stress in polycrystalline GaN films prepared by r.f sputteringM. Pal Chowdhury, R. K. Roy, S. R. Bhattacharyya and A. K. PalEur. Phys. J. B, 48 1 (2005) 47-53DOI: https://doi.org/10.1140/epjb/e2005-00379-8