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Stress in polycrystalline GaN films prepared by r.f sputtering

M. Pal Chowdhury, R. K. Roy, S. R. Bhattacharyya and A. K. Pal

Eur. Phys. J. B, 48 1 (2005) 47-53

DOI: https://doi.org/10.1140/epjb/e2005-00379-8

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