Correlation of process parameters and properties of TiO2 films grown by ion beam sputter deposition from a ceramic targetCarsten Bundesmann, Thomas Lautenschläge, Daniel Spemann, Annemarie Finzel, Michael Mensing and Frank FrostEur. Phys. J. B, 90 10 (2017) 187DOI: https://doi.org/10.1140/epjb/e2017-80326-x