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Correlation of process parameters and properties of TiO₂ films grown by ion beam sputter deposition from a ceramic target

Carsten Bundesmann, Thomas Lautenschläge, Daniel Spemann, Annemarie Finzel, Michael Mensing and Frank Frost

Eur. Phys. J. B, 90 10 (2017) 187

DOI: https://doi.org/10.1140/epjb/e2017-80326-x

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