Fabrication and structural characterization of TiO nanoparticle soft-landed on substrate by the magnetron sputtering-gas aggregation methodS. Tanemura, K. Kajino, L. Miao, S. Koide, M. Tanemura, S. Toh, K. Kaneko and M. MoriEur. Phys. J. D, 34 1-3 (2005) 79-82DOI: https://doi.org/10.1140/epjd/e2005-00123-8