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Evaluation of plasma density in RF CCP discharges from ion current to Langmuir probe: experiment and numerical simulation

Dmitry Voloshin, Alexander Kovalev, Yuri Mankelevich, Olga Proshina, Tatyana Rakhimova and Anna Vasilieva

Eur. Phys. J. D, 69 1 (2015) 23

DOI: https://doi.org/10.1140/epjd/e2014-50313-2

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