Evaluation of plasma density in RF CCP discharges from ion current to Langmuir probe: experiment and numerical simulationDmitry Voloshin, Alexander Kovalev, Yuri Mankelevich, Olga Proshina, Tatyana Rakhimova and Anna VasilievaEur. Phys. J. D, 69 1 (2015) 23DOI: https://doi.org/10.1140/epjd/e2014-50313-2