Experimental and DFT study of nitrogen atoms interactions with SiOCH low-κ films
Ekaterina N. Voronina, Yuri A. Mankelevich, Tatyana V. Rakhimova, Alexander P. Palov, Dmitry V. Lopaev, Sergey M. Zyryanov, Alexey I. Zotovich and Mikhail R. Baklanov
Eur. Phys. J. D, 71 5 (2017) 111
DOI: https://doi.org/10.1140/epjd/e2017-70618-8