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Experimental and DFT study of nitrogen atoms interactions with SiOCH low-κ films

Ekaterina N. Voronina, Yuri A. Mankelevich, Tatyana V. Rakhimova, Alexander P. Palov, Dmitry V. Lopaev, Sergey M. Zyryanov, Alexey I. Zotovich and Mikhail R. Baklanov

Eur. Phys. J. D, 71 5 (2017) 111

DOI: https://doi.org/10.1140/epjd/e2017-70618-8

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EPJ A Topical Issue: Heavy and Super-Heavy Nuclei and Elements: Production and Properties
EPJ A Topical Issue: Light clusters in nuclei and nuclear matter: Nuclear structure and decay, heavy ion collisions, and astrophysics
EPJ A Topical Issue: The QCD Phase Diagram in Strong Magnetic Fields
EPJ B Topical Issue: Extreme Value Statistics and Search in Biology: Theory and Simulations
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EPJ B Topical Issue: Recent progress and emerging trends in Molecular Dynamics
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EPJ E Topical Issue: Physics of phase separation in cell biophysics: From non-equilibrium droplets to reaction-diffusion systems
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EPJ Plus Focus Point Issue: Breakthrough optics- and complex systems-based technologies of modulation of drainage and clearing functions of the brain
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