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Reactive pathways of hydrogen and carbon removal from organosilicate glass low-κ films by F atoms

Ekaterina N. Voronina, Yuri A. Mankelevich and Tatyana V. Rakhimova

Eur. Phys. J. D, 71 7 (2017) 184

DOI: https://doi.org/10.1140/epjd/e2017-80136-4

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