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Atomistic modeling of thermal effects in focused electron beam-induced deposition of MeAu(tfac)

Alexey Prosvetov, Alexey V. Verkhovtsev, Gennady Sushko and Andrey V. Solov’yov

Eur. Phys. J. D, 77 1 (2023) 15

DOI: https://doi.org/10.1140/epjd/s10053-023-00598-5

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