Atomistic modeling of thermal effects in focused electron beam-induced deposition of MeAu(tfac)Alexey Prosvetov, Alexey V. Verkhovtsev, Gennady Sushko and Andrey V. Solov’yovEur. Phys. J. D, 77 1 (2023) 15DOI: https://doi.org/10.1140/epjd/s10053-023-00598-5