Improved parameter targeting in 3D-integrated superconducting circuits through a polymer spacer processGraham J. Norris, Laurent Michaud, David Pahl, Michael Kerschbaum, Christopher Eichler, Jean-Claude Besse and Andreas WallraffEPJ Quantum Technol., 11 1 (2024) 5DOI: https://doi.org/10.1140/epjqt/s40507-023-00213-x