Silicon carbide thin films for EUV and soft X-ray applicationsG. Monaco, M. Gastaldi, P. Nicolosi, M. G. Pelizzo, E. Gilioli, S. Rampino, F. Bissoli, F. Pattini, S. Agnoli, G. Granozzi and N. ManuzzatoEur. Phys. J. Special Topics, 169 (2009) 159-165DOI: https://doi.org/10.1140/epjst/e2009-00987-6