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Silicon carbide thin films for EUV and soft X-ray applications

G. Monaco, M. Gastaldi, P. Nicolosi, M. G. Pelizzo, E. Gilioli, S. Rampino, F. Bissoli, F. Pattini, S. Agnoli, G. Granozzi and N. Manuzzato

Eur. Phys. J. Special Topics, 169 (2009) 159-165

DOI: https://doi.org/10.1140/epjst/e2009-00987-6

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EPJ A Topical Issue: Heavy and Super-Heavy Nuclei and Elements: Production and Properties
EPJ A Topical Issue: Light clusters in nuclei and nuclear matter: Nuclear structure and decay, heavy ion collisions, and astrophysics
EPJ B Topical Issue: Extreme Value Statistics and Search in Biology: Theory and Simulations
EPJ B Topical Issue: Evolutionary Game Theory
EPJ B Topical Issue: Recent progress and emerging trends in Molecular Dynamics
EPJ D Topical Issue: Advances in Multi-Scale Modelling of Intense Electronic Excitation Processes
EPJ D Topical Issue: Atomic, Molecular and Optical Techniques for Fundamental Physics
EPJ D Topical Issue: Low Temperature Plasmas: Processes, Diagnostics and Applications
EPJ D Topical Issue: Molecular collisions, photoionization and dynamics: honouring Professor Vincent McKoy
EPJ D Topical Issue: Quantum Aspects of Attoscience
EPJ Data Science Special Issue on Data Science Perspectives on Economic Crime
EPJ E Special Issue: Diffusion and Convection in Nature
EPJ E Topical Issue: Physics of phase separation in cell biophysics: From non-equilibrium droplets to reaction-diffusion systems
EPJ E Topical Issue: Thermal non-equilibrium phenomena in fluid mixtures
EPJ E Topical Issue: Tissue Mechanics
EPJ N Topical Issue: Fuel Cycle Simulation
EPJ Plus Focus Point Issue: Advances in Hyperspectral Data Processing for Cultural Heritage
EPJ Plus Focus Point Issue: Breakthrough optics- and complex systems-based technologies of modulation of drainage and clearing functions of the brain
EPJ Quantum Technology: Special Issue on Quantum Random Number Generation
EPJ ST Special Issue: Advances in Low-Dimensional and Nanostructured Materials for Sustainable Energy Conversion and Storage
EPJ ST Special Issue: Chaotic variable-order fractional neural networks
EPJ ST Special Issue: Complex Bio Rhythms
EPJ ST Special Issue: Complex Urban Systems
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EPJ ST Special Issue: Symmetry, Dynamics and Strings: A Centennial Issue in Honor of Yoichiro Nambu
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