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Silicon carbide thin films for EUV and soft X-ray applications

G. Monaco, M. Gastaldi, P. Nicolosi, M. G. Pelizzo, E. Gilioli, S. Rampino, F. Bissoli, F. Pattini, S. Agnoli, G. Granozzi and N. Manuzzato

Eur. Phys. J. Special Topics, 169 (2009) 159-165

DOI: https://doi.org/10.1140/epjst/e2009-00987-6

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